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Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends: Journal of Applied Physics: Vol 113, No 2
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Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends: Journal of Applied Physics: Vol 113, No 2
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Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends: Journal of Applied Physics: Vol 113, No 2
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